Sommargren, Gary: search on Z-Library

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1

SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Optical/Laser Microlithography II - Linear/Angular Displacement Interferometer For Wafer Stage Metrology

Sommargren, Gary E., Lin, Burn J.

Year:

1989

Language:

english

File:

PDF, 2.81 MB

english, 1989

2

Harmonic diffractive lenses

Sweeney, Donald W., Sommargren, Gary E.

Journal:

Year:

1995

Language:

english

File:

PDF, 1.26 MB

english, 1995

3

SPIE Proceedings [SPIE Acquisition & Analysis of Pictorial Data - San Diego (Monday 19 August 1974)] Acquisition and Analysis of Pictorial Data - Self-Calibration And Analysis Of Image Formation In The Sub-Nanosecond Domain

Weaver, H.Joseph, Sommargren, Gary. E., Bliss, Erlan S., Michael, George A.

Year:

1975

Language:

english

File:

PDF, 3.00 MB

english, 1975

4

Diffraction of light by an opaque sphere 1: Description and properties of the diffraction pattern

Sommargren, Gary E., Weaver, H. Joseph

Journal:

Year:

1990

Language:

english

File:

PDF, 1.99 MB

english, 1990

5

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Emerging Lithographic Technologies VI - 100-picometer interferometry for EUVL

Sommargren, Gary E., Phillion, D. W., Johnson, Michael A., Nguyen, Nhan Q., Barty, Anton, Snell, Franklyn J., Dillon, Daren R., Bradsher, Lloyd S., Engelstad, Roxann L.

Year:

2002

Language:

english

File:

PDF, 480 KB

english, 2002

6

Laser Doppler velocimeter for velocity and length measurements of moving surfaces

Truax, Bruce E., Demarest, Frank C., Sommargren, Gary E.

Journal:

Year:

1984

Language:

english

File:

PDF, 953 KB

english, 1984

7

Effect of wavefront error on 10−7 contrast measurements

Evans, Julia W., Sommargren, Gary, Macintosh, Bruce A., Severson, Scott, Dillon, Daren

Journal:

Year:

2006

Language:

english

File:

PDF, 248 KB

english, 2006

8

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Optical Manufacturing and Testing VI - Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems

Phillion, Donald W., Stahl, H. Philip, Sommargren, Gary E., Johnson, Michael A., Decker, Todd A., Taylor, John S., Gomei, Yoshio, Kakuchi, Osamu, Takeuchi, Seiji

Year:

2005

Language:

english

File:

PDF, 272 KB

english, 2005

9

SPIE Proceedings [SPIE Astronomical Telescopes and Instrumentation - Waikoloa, HI (Thursday 22 August 2002)] X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy - Diffraction-limited astronomical X-ray imaging and X-ray interferometry using normal-incidence multilayer optics

Windt, David L., Kahn, Steven M., Sommargren, Gary E., Truemper, Joachim E., Tananbaum, Harvey D.

Year:

2003

Language:

english

File:

PDF, 642 KB

english, 2003

10

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Minimizing mapping-induced OPD errors when testing aspheric mirrors

Hudyma, Russell M., Vladimirsky, Yuli, Sommargren, Gary E.

Year:

1998

Language:

english

File:

PDF, 1.82 MB

english, 1998

11

Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography

Sommargren, Gary E., Seppala, Lynn G.

Journal:

Year:

1993

Language:

english

File:

PDF, 799 KB

english, 1993

12

Optical heterodyne profilometry

Sommargren, Gary E.

Journal:

Year:

1981

Language:

english

File:

PDF, 1.06 MB

english, 1981

13

Linear Phase Microscopy

Sommargren, Gary E., Thompson, Brian J.

Journal:

Year:

1973

Language:

english

File:

PDF, 1.47 MB

english, 1973

14

Double-exposure holographic interferometry using commonpath reference waves

Sommargren, Gary E.

Journal:

Year:

1977

Language:

english

File:

PDF, 954 KB

english, 1977

15

SPIE Proceedings [SPIE Astronomical Telescopes and Instrumentation - Munich, Germany (Monday 27 March 2000)] Optical Design, Materials, Fabrication, and Maintenance - Primary mirror segment fabrication for CELT

Mast, Terry S., Nelson, Jerry E., Sommargren, Gary E., Dierickx, Philippe

Year:

2000

Language:

english

File:

PDF, 497 KB

english, 2000

16

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - Electrostatic comb drive for vertical actuation

Lee, Abraham P., McConaghy, Charles F., Krulevitch, Peter A., Campbell, Eugene W., Sommargren, Gary E., Trevino, Jimmy C., Chau, Kevin H., French, Patrick J.

Year:

1997

Language:

english

File:

PDF, 1.33 MB

english, 1997

17

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Fabrication and testing of optics for EUV projection lithography

Taylor, John S., Sommargren, Gary E., Sweeney, Donald W., Hudyma, Russell M., Vladimirsky, Yuli

Year:

1998

Language:

english

File:

PDF, 1.18 MB

english, 1998

18

Diffraction of light by an opaque sphere 2: Image formation and resolution considerations

Sommargren, Gary E., Weaver, H. Joseph

Journal:

Year:

1992

Language:

english

File:

PDF, 1.85 MB

english, 1992

19

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Techniques and Instrumentation for Detection of Exoplanets - Extreme adaptive optics planet imager: XAOPI

Macintosh, Bruce A., Coulter, Daniel R., Graham, James, Poyneer, Lisa, Sommargren, Gary, Wilhelmsen, Julia, Gavel, Don, Jones, Steve, Kalas, Paul, Lloyd, James P., Makidon, Russ, Olivier, Scot, Palmer

Year:

2003

Language:

english

File:

PDF, 623 KB

english, 2003

20

SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - USA (Monday 21 June 2004)] Advancements in Adaptive Optics - Extreme adaptive optics testbed: results and future work

Wilhelmsen Evans, Julia, Sommargren, Gary, Poyneer, Lisa, Macintosh, Bruce A., Severson, Scott, Dillon, Daren, Sheinis, Andrew I., Palmer, Dave, Kasdin, N. Jeremy, Olivier, Scot

Year:

2004

Language:

english

File:

PDF, 234 KB

english, 2004

21

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Optical Manufacturing and Testing VI - Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems

Johnson, Michael A., Stahl, H. Philip, Phillion, Donald W., Sommargren, Gary E., Decker, Todd A., Taylor, John S., Gomei, Yoshio, Kakuchi, Osamu, Takeuchi, Seiji

Year:

2005

Language:

english

File:

PDF, 775 KB

english, 2005

22

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

Attwood, David, Sommargren, Gary, Beguiristain, Raul, Nguyen, Khanh, Bokor, Jeffrey, Ceglio, Natale, Jackson, Keith, Koike, Masato, Underwood, James

Journal:

Year:

1993

Language:

english

File:

PDF, 1.27 MB

english, 1993

23

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Techniques and Instrumentation for Detection of Exoplanets II - Extreme adaptive optics testbed: high contrast measurements with a MEMS deformable mirror

Evans, Julia W., Morzinski, Katie, Reza, Layra, Severson, Scott, Poyneer, Lisa, Macintosh, Bruce A., Dillon, Daren, Sommargren, Gary, Palmer, David, Gavel, Don, Olivier, Scot, Coulter, Daniel R.

Year:

2005

Language:

english

File:

PDF, 429 KB

english, 2005

24

Up/down frequency shifter for optical heterodyne interferometry

Sommargren, Gary E.

Journal:

Journal of the Optical Society of America

Year:

1975

Language:

english

File:

PDF, 291 KB

english, 1975

25

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V - At-wavelength testing of optics for EUV

Goldberg, Kenneth A., Beguiristain, H. R., Bokor, Jeffrey, Medecki, Hector, Jackson, Keith H., Attwood, Jr., David T., Sommargren, Gary E., Spallas, James P., Hostetler, Ralph E., Warlaumont, John M.

Year:

1995

Language:

english

File:

PDF, 381 KB

english, 1995

26

Front-end design issues in soft-x-ray projection lithography

Ceglio, Natale M., Hawryluk, Andrew M., Sommargren, Gary E.

Journal:

Year:

1993

Language:

english

File:

PDF, 918 KB

english, 1993

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